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Poly-SiGe for MEMS-above-CMOS Sensors 87 This book deals with the 9781402047152
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Poly-SiGe for MEMS-above-CMOS Sensors 87 This book deals with the 9781402047152
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Poly SiGe for MEMS above CMOS Sensors 87 This book deals with the 9781402047152 This book deals with the first approach Trends and developments this book presents the first detailed investigation on the influence of deposition conditions Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly Si
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